AS/NZS ISO 14644.5 PDF
AS/NZS ISO 14644.5 PDF
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AS/NZS ISO 14644.5 PDF

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Cleanrooms and associated controlled environments, Part 5: Operations

Published byPublication DateNumber of Pages
AS/NZS01/06/200644
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AS/NZS ISO 14644.5 – Cleanrooms and associated controlled environments, Part 5: Operations

Adopts of ISO 14644-5:2004 to specify basic requirements for cleanroom operations. It is intended for those planning to use and operate a cleanroom.

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