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IEST RP-CC042.1 PDF
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Sizing and Counting of Submicrometer Liquid-borne Particles Using Optical Discrete-particle Counters
| Published by | Publication Date | Number of Pages |
| IEST | 10/01/2011 | 32 |
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IEST RP-CC042.1 – Sizing and Counting of Submicrometer Liquid-borne Particles Using Optical Discrete-particle Counters
IEST RP-CC042.1 addresses the sizing and counting of submicrometer liquid-borne particles using optical discrete-partical counters with a focus on applications in the semiconductor, flat-panel display, and data storage industries. Liquid-borne particle measurement involves many technical challenges that can substantially affect results in both sizing and counting of particles. This RP is intended as a single source covering those challenges and solutions and provides a handy reference for professionals in this field.
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