AS/NZS ISO 14644.5 PDF
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Cleanrooms and associated controlled environments, Part 5: Operations
Published by | Publication Date | Number of Pages |
AS/NZS | 01/06/2006 | 44 |
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AS/NZS ISO 14644.5 – Cleanrooms and associated controlled environments, Part 5: Operations
Adopts of ISO 14644-5:2004 to specify basic requirements for cleanroom operations. It is intended for those planning to use and operate a cleanroom.
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